The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2004
Filed:
Apr. 19, 2002
Applicant:
Inventors:
Kameshwar Polla, Berkeley, CA (US);
Costas J. Spanos, Lafayette, CA (US);
Assignee:
OnWafer Technologies, Inc., Dublin, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; G01K 7/00 ;
U.S. Cl.
CPC ...
G06F 1/900 ; G01K 7/00 ;
Abstract
Described are methods and apparatus for collecting measured parameter data for applications such as deriving response models and information required for developing and maintaining processes and process tools. The methods and apparatus are capable of deriving correction factors for the measured data and applying the corrections factors to the measured data so as to provide corrected parameter data having increased accuracy.
Quick Actions:
Polla, Kameshwar. (2004). Data collection and correction methods and apparatus (U.S. Patent No. 6738722). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6738722
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile