The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2004
Filed:
Feb. 06, 2003
Yoshiaki Kobayashi, Tsuchiura, JP;
Trecenti Technologies, Inc., Ibaraki, JP;
Abstract
Shortening TAT for processing express lots without reducing the utilization rate of manufacturing apparatuses for semiconductor device. When the number of vacant ports LPOT of a manufacturing apparatus EQ used in a next step is only one at the of time of completing a process for a normal lot LA by a manufacturing apparatus EQ and when there is a possibility that processes for an express lot LB performed by a manufacturing apparatus EQ will be completed before a remaining processing time period for a lot LC performed by the manufacturing apparatus EQ reaches a predetermined set value, the lot LA is transferred to a lot stocker LS for securing a vacant port LPOT and as soon as the processes for the express lot LB performed by the manufacturing apparatus EQ are completed, the express lot LB is transferred to the vacant port LPOT in the manufacturing apparatus EQ