The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2004

Filed:

Oct. 02, 2002
Applicant:
Inventors:

Kiyomi Watanabe, Kashiwa, JP;

Takayuki Mimura, Tokyo, JP;

Teruo Tomaki, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05F 1/40 ;
U.S. Cl.
CPC ...
G05F 1/40 ;
Abstract

An energy accumulating capacitor such as an excimer laser is prevented from being overcharged by stored energy in a resonance inductance device. In a resonant capacitor charging circuit, when it is forecast that an energy accumulating capacitor can be charged to a target charge voltage by the magnetic energy of a resonant inductance device after a first semiconductor switch is switched off, the first semiconductor switch is switched off, and when actually reaching the target charge voltage, a second semiconductor switch is switched on or off, in order to charge with high accuracy.


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