The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2004

Filed:

Apr. 26, 2001
Applicant:
Inventors:

Seiji Momota, Nagano, JP;

Yuichi Onozawa, Nagano, JP;

Masahito Otsuki, Nagano, JP;

Hiroki Wakimoto, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/9745 ; H01L 2/978 ;
U.S. Cl.
CPC ...
H01L 2/9745 ; H01L 2/978 ;
Abstract

A trench-type IGBT includes a silicon substrate, a lightly doped n-type drift layer on the silicon substrate, and a p-type base layer on the n-type drift layer. The p-type base layer is doped more heavily than the n-type drift layer, and is formed of first regions and second regions. N -type source regions are formed selectively in the surface portions of the first regions of p-type base layer. Trenches are dug from the surfaces of n -type source regions down to the n-type drift layer through the p-type base layer. A gate oxide film covers the inner surface of each trench. Gate electrodes are provided in the trenches, wherein the gate electrodes face the p-type base layer via respective gate oxide films. An emitter electrode is in direct contact with the first regions of p-type base layer and n -type source regions. A collector electrode is provided on the back surface of silicon substrate. The ratio of the width of the first regions to the width of the second regions of p-type base layer is from 1:2 to 1:7. The device facilitates in reducing the total losses by reducing the switching loss while suppressing the on-voltage thereof as low as the on-voltage of the IEGT.


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