The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2004
Filed:
Jul. 03, 2002
Applicant:
Inventors:
Toshiyuki Kawakami, Tenri, JP;
Yukio Yamasaki, Daitou, JP;
Shigetoshi Ito, Ikoma, JP;
Susumu Omi, Osaka, JP;
Assignee:
Sanyo Electric Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/715 ;
U.S. Cl.
CPC ...
H01L 2/715 ;
Abstract
In a wafer having an LD structure formed on a GaN-based substrate , cleavage guide grooves are formed in its surface by scribing from above the LD structure with a diamond needle. The cleavage guide grooves are formed one along each of stripe-shaped waveguides formed parallel to the < - >direction of the wafer, and are formed in the shape of broken lines in the < - >direction of the wafer.