The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 2004

Filed:

Nov. 05, 2002
Applicant:
Inventors:

Jörg-Achim Fischer, Laboe, DE;

Jörg Suhr, Rickert, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/700 ;
U.S. Cl.
CPC ...
H01L 2/700 ;
Abstract

A method for adjusting variable illumination parameters of a laser imagesetter including laser power, focus adjustment, scan rate, and/or feed rate during the illumination of a photosensitive material, in particular, during illumination tests, includes the steps of reducing the time taken and the workload for determining the correct imagesetter setting by calculating at least some of the illumination parameters, prior to the adjustment, based upon imagesetter-independent characteristic data including material thickness, material sensitivity, material-specific test patterns, and/or material-specific evaluation criteria of the photosensitive material to be illuminated, and, subsequently, adjusting the calculated illumination parameters automatically.


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