The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6736949 B1

PDF
Full Text
Expired
Date of Patent:
May. 18, 2004

Filed:

Dec. 11, 2001
Applicant:
Inventors:

Xu Shi, Singapore, SG;

Beng Kang Tay, Singapore, SG;

David Ian Flynn, Singapore, SG;

Hong Siang Tan, Selangor, MY;

Michael Fulton, Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/432 ;
U.S. Cl.
CPC ...
C23C 1/432 ;
Abstract

Deposition apparatus incorporating either a single or multiple filtered cathodic arc (FCA) source for depositing coatings such as tetrahedral amorphous carbon (TAC); metal oxides; compounds and alloys of such materials onto various types of substrates, such as metals semiconductors, plastics ceramics and glasses. Substrates are moved through the plasma beam(s) of the FCA source(s) and beam scanning increases deposition area. Macroparticles are filtered by a double bend filter duct.


Find Patent Forward Citations

Shi, Xu. (2004). Filtered cathode arc source deposition apparatus (U.S. Patent No. 6736949). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6736949

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