The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2004
Filed:
Mar. 07, 2002
Akihiro Hisai, Kyoto, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
A thermal processor comprises a thermal processing plate employing a heat pipe structure, a heater heating a working fluid and a cooling plate for reducing the temperature of the thermal processing plate. In order to reduce the temperature of the thermal processing plate, a cooling water supply part supplies cooling water to the cooling plate, for reducing the temperature of the thermal processing plate at a high speed. Then, a compressed air supply part supplies compressed air to the cooling plate, for reducing the temperature of the thermal processing plate at a low speed. Thus, a thermal processor capable of quickly reducing the temperature of a thermal processing plate to a set level without exerting bad influence on a result of processing a substrate is provided.