The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 2004

Filed:

Feb. 07, 2002
Applicant:
Inventor:

Nimrod Sarig, Rosh Ha'Ayin, IL;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/750 ; G06F 1/900 ; G06F 1/718 ; G06K 9/74 ; G06K 9/46 ;
U.S. Cl.
CPC ...
G06F 1/750 ; G06F 1/900 ; G06F 1/718 ; G06K 9/74 ; G06K 9/46 ;
Abstract

Method for detecting defects, the method comprising the procedures of identifying theoretically-symmetrical windows in an object-image; analyzing the theoretically-symmetrical windows according to expected symmetry of the theoretically-symmetrical windows; and determining the presence of defects according to a deviation from the expected symmetry.


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