The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Jul. 29, 1999
Eiji Yonezawa, Aichi, JP;
Nidek Co., Ltd., Aichi, JP;
Abstract
A pattern inspecting apparatus includes an illuminating optical system for illuminating a pattern in a region subject to inspection on a workpiece from a substantially perpendicular direction; a detecting optical system for detecting regularly reflected light or transmitted light from the pattern illuminated by the illuminating optical system, the detecting optical system having a numerical aperture which does not allow the structure of the pattern in the region subject to inspection to be optically resolved; a wavelength-varying system for selectively rendering variable the wavelength of the light detected by the detecting optical system; and a measuring system for measuring the structure of the pattern on the basis of light intensity information of the detected light in correspondence with the wavelength varied by the wavelength-varying system.