The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Dec. 04, 2001
Tohru Ishitani, Hitachinaka, JP;
Hidemi Koike, Hitachinaka, JP;
Aritoshi Sugimoto, Tokyo, JP;
Isamu Sekihara, Fussa, JP;
Kaoru Umemura, Musashino, JP;
Satoshi Tomimatsu, Kokubunji, JP;
Junzo Azuma, Hitachiota, JP;
Other;
Abstract
Disconnection defects, short-circuit defects and the like in wiring patters of submicron sizes within TEGs (a square of 1 to 2.5 mm for each) numerously arranged in a large chip (a square of 20 to 25 mm) can be inspected with respect to all the TEGs, with good operability, high reliability and high efficiency. A conductor probe for applying voltage to the wiring patterns by mechanical contact is composed of synchronous type conductor probe that synchronizes with movement of a sample stage ( ), and fixed type conductor probe means ( ) that is relatively fixed to an FIB generator ( ). Positions of probe tips are superimposed to an SIM image and displayed on a display unit ( ).