The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2004
Filed:
Nov. 20, 2002
Applicant:
Inventors:
Assignee:
Kyocera Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16C 3/266 ;
U.S. Cl.
CPC ...
F16C 3/266 ;
Abstract
The XY stage mechanism comprises a Y slide shaft penetrating through only one side surface of the wall surfaces of a vacuum chamber for holding a stage base plate in a cantilevered manner, a Y air slide bearing for guiding the Y slide shaft , an X air slide plate , a first air slide bearing for supporting the X air slide plate , a coupling portion , and a second X air slide bearing serving as the guide of the coupling portion , whereby, in a state where not only the Y slide shaft is floated up but also the X air slide plate and coupling portion are floated up, the XY stage is driven.