The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Jan. 29, 2001
Imin Kao, Stony Brook, NY (US);
Fu-Pen Chiang, Stony Brook, NY (US);
The Research Foundation of State University of New York, Stony Brook, NY (US);
Abstract
A method and apparatus for surface measurement using the shadow moire effect with the Talbot effect. The apparatus includes a specimen mount to receive a specimen having a surface to be measured, and a reference grating mounted adjacent to the specimen mount so as to be substantially parallel to a mean surface plane of the specimen. The reference grating is mounted in such a manner that the distance between the reference grating and the mean surface plane of the specimen can be adjusted to a Talbot distance &dgr;T. The apparatus also includes a light source to illuminate the specimen through the grating and a detector positioned to detect the moire fringes produced by the grating due to variation of the surface of the specimen.