The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Mar. 27, 2001
Mike Binnard, Belmont, CA (US);
Douglas C. Watson, Campbell, CA (US);
Nikon Corporation, , JP;
Abstract
A fluid mount ( ) for an exposure apparatus ( ) includes a first subsystem ( ) and a second subsystem ( ). The first subsystem ( ) includes a first cylinder ( ) and a first piston ( ). The first piston ( ) moves within the first cylinder ( ) along a first axis ( ). The second subsystem ( ) includes a second cylinder ( ) and a second piston ( ). The second piston ( ) moves within the second cylinder ( ) along a second axis ( ). Importantly, (i) the second subsystem ( ) is stacked on top of the first subsystem ( ), (ii) the second axis ( ) is substantially coaxial with the first axis ( ), and (iii) the first piston ( ) is connected to the second piston ( ) with a piston connector ( ). The resulting fluid mount ( ) has a relatively high load carrying capacity and a relatively small footprint.