logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6730619 B1

PDFFull Text
Expired
Date of Patent:
May. 04, 2004

Filed:

Apr. 16, 2002

Method of manufacturing insulating layer and semiconductor device including insulating layer

Applicant:
Inventors:

Woo-Chan Jung, Seoul, KR;

Jin-Ho Jeon, Seoul, KR;

Jeon-Sig Lim, Whasung-gun, KR;

Jong-Seung Yi, Suwon-si, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon, KR;

Attorney:

Volentine Francos, PLLC

Primary Examiner:

Tom Thomas

Assistant Examiner:

José R Díaz

Int. Cl.
CPC ...
H01L 2/131 ; H05H 1/24 ;
U.S. Cl.
CPC ...
H01L 2/131 ; H05H 1/24 ;
Abstract

A method of manufacturing an insulating layer that ensures reproducibility across like manufacturing apparatus. The insulating layer is formed on the substrate by (a) flowing an oxidizing gas at an oxidizing gas flow rate, (b) flowing a first carrier gas at a first carrier gas flow rate while carrying a first impurity including boron flowing at a first impurity flow rate, (c) flowing a second carrier gas at a second carrier gas flow rate while carrying a second impurity including phosphorus flowing at a second impurity flow rate, and (d) flowing a silicon source material at a silicon source flow rate. The second carrier gas flow rate is greater than the first carrier gas flow rate.

Find Patent Forward Citations

Jung, Woo-Chan. (2004). Method of manufacturing insulating layer and semiconductor device including insulating layer (U.S. Patent No. 6730619). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6730619

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…