The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Apr. 24, 2002
Kenneth Raymond Carter, San Jose, CA (US);
Other;
Abstract
A process for forming a portion of an integrated circuit includes placing a layer of material on a substrate, in which the material includes a polymeric composition or a precursor to a dielectric composition. The material is contacted with a stamping surface having relief structures that define a pattern, so that a patterned layer is formed as a result of the contact, which may include heating the material to mold it. A metal film or layer is then deposited onto the patterned layer. The metal can then be planarized to form a layer of an integrated circuit. A decomposable or sacrificial polymer is preferably included in the material, so that porous dielectric material is formed, thereby leading to a lower dielectric constant of the end product.