The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Dec. 18, 2002
Toyoji Ito, Shiga, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
First, a capacitor device including a capacitor dielectric film of a metal oxide is formed on a substrate. Subsequently, an interlayer insulating film of an oxide is deposited on the capacitor device, an opening is formed in a region of the interlayer insulating film disposed above the capacitor device, and then, a conducting film connected to the capacitor device through the opening is formed so as to expose a portion of the interlayer insulating film disposed above a periphery of the capacitor device. During a convey time when the substrate on which the conducting film has been formed is being conveyed to a subsequent step or during a wait time before or after conveying the substrate to the subsequent step, the substrate on which the conducting film has been formed is contained in a container an atmosphere within which has a lower moisture concentration than the ambient atmosphere until a substantially whole top face of the interlayer insulating film is covered with another member.