The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2004
Filed:
Dec. 27, 2000
Arnold J. Goldman, Jerusalem, IL;
Jehuda Hartman, Rehovot, IL;
Joseph Fisher, Jerusalem, IL;
Shlomo Sarel, Ma'aleh Michmash, IL;
Insyst Ltd., Jerusalem, IL;
Abstract
A method and system to enhance yield in multi-process manufacturing. The method comprising the translation of a performance parameter of a product into input variables to operate tools carrying our cooperating processes which built a structural element which determines the performance parameter, wherein the individual tools are process controlled. The method further comprising the integration of process control of individual separate processes or of stages in a process, into a combined and comprehensive (modular) process control in which the process parameters of a process are enslaved to accomplish the target output of the final process. Hence target output values of intermediate processes are dynamically reassigned during the manufacturing with respect to their initially designed values, in accordance with the output of their cooperating processes.