The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2004
Filed:
Mar. 22, 2002
Applicant:
Inventors:
Yoshihiro Nakata, Kawasaki, JP;
Katsumi Suzuki, Kawasaki, JP;
Iwao Sugiura, Kawasaki, JP;
Ei Yano, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 3/524 ;
U.S. Cl.
CPC ...
H01L 3/524 ;
Abstract
Porous insulation films are formed of an insulation forming material including a silicon compound having a skeleton containing C—C bonds, a pore forming compound which is decomposed or evaporated by a heat treatment, and a solvent which dissolves the silicon compound with the pore forming compound, whereby the porous insulation film can have good mechanical strength and low dielectric constant.
Nakata, Yoshihiro. (2004). Insulation film forming material, insulation film, method for forming the insulation film, and semiconductor device (U.S. Patent No. 6727515). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6727515
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile