The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2004

Filed:

Jan. 28, 2003
Applicant:
Inventors:

Guy Peter Bryan-Brown, Malvern, GB;

Emma Louise Wood, Malvern, GB;

Assignee:

ZBD Displays Limited, Malvern, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 ; G03F 7/095 ;
U.S. Cl.
CPC ...
G03F 7/00 ; G03F 7/095 ;
Abstract

A first layer of photoresist material, sensitive to radiation of a first wavelength, has a second layer of photoresist material, sensitive to radiation of a second wavelength, deposited thereon. A pattern of radiation of the second wavelength is then formed on the second layer of photoresist material which is subsequently treated with a solvent, in which the first layer of photoresist material is insoluble, to develop a first periodic profile. The first layer of photoresist material is then exposed to radiation of the first wavelength through the first periodic profile and treated to develop a second periodic profile. By directing the radiation of the second wavelength through the first periodic profile at an angle to normal to the first material photoresist material a blaze profile may be obtained.


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