The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2004
Filed:
Oct. 08, 1999
Masahiro Kawai, Tokyo, JP;
Tomoya Yamakawa, Tokyo, JP;
Akira Yamashita, Tokyo, JP;
Yuuichi Sakai, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A thermo-sensitive flow rate sensor having a flow rate detecting device comprising: a plate-like substrate; a heating element and a temperature compensating element constituted by thermo-sensitive resistance films and formed on a top surface of the substrate in such a way as to be spaced apart from each other; and a low heat capacity portion formed by removing partially an area, in which the heating element is formed, of the substrate from a back surface side thereof. This thermo-sensitive flow rate sensor is used for measuring the flow velocity or flow rate of a measurement fluid according to a heat transfer phenomenon where a heat is transferred from the heating element or from a portion heated by the heating element to the measurement fluid. In this thermo-sensitive flow rate sensor, a diaphragm is constructed by forming at least one cavity by removing partially a region other than the area, in which the heating element and the temperature compensating element are formed, of the substrate from the back surface side thereof.