The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Feb. 01, 2002
Applicant:
Inventors:
Assignee:
Intpax, Inc., Cupertino, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 2/600 ; G02B 1/10 ; G02F 1/00 ; H01L 2/100 ;
U.S. Cl.
CPC ...
G02B 2/600 ; G02B 1/10 ; G02F 1/00 ; H01L 2/100 ;
Abstract
This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . , etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.