The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Apr. 23, 2001
Applicant:
Inventors:
Mark J. Beck, Los Gatos, CA (US);
Richard B. Vennerbeck, Los Gatos, CA (US);
Assignee:
Product Systems Incorporated, Campbell, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/10 ;
U.S. Cl.
CPC ...
B08B 3/10 ;
Abstract
A megasonic cleaning system comprised of a one-piece cleaning tank, one or more piezoelectric crystals and an indium layer for attaching the piezoelectric crystals to the cleaning tank. The tank comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, ceramics and stainless steel. The piezoelectric crystals are attached directly to a side or to the bottom of the tank.