The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Jun. 18, 2002
Applicant:
Inventors:
Michael Caradonna, Los Altos, CA (US);
Sarosh Patel, Sunnyvale, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 2/100 ;
U.S. Cl.
CPC ...
G01D 2/100 ;
Abstract
A compliance assembly is disclosed for use in a semiconductor tester testhead stand. The compliance assembly includes an airspring having compliance along a plurality of axes and a containment vessel adapted for receiving the airspring. The containment vessel includes walls that, when the airspring is loaded, control the compliance along the plurality of axes.