The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2004
Filed:
Jul. 16, 2002
Applicant:
Inventors:
John E. Menear, Santa Cruz, CA (US);
Lawrence B. Levit, Alamo, CA (US);
Assignee:
ION Systems, Inc., Berkeley, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65D 8/500 ; B65D 8/530 ; B65D 8/548 ;
U.S. Cl.
CPC ...
B65D 8/500 ; B65D 8/530 ; B65D 8/548 ;
Abstract
Apparatus and method and system for measuring and controlling electrostatic charge on objects such as semiconductor substrates include a cassette having an inner structure with supporting slots and electrically conductive regions, and having isolated conductive outer walls for supporting objects in the slots, and include a charge monitor connected to the conductive regions and the conductive walls for sensing charge applicable to one or more objects carrying static charge positioned within the cassette. Charge neutralization is controlled in response to sensed charge attaining a selected level.