The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2004
Filed:
Jan. 17, 2003
Applicant:
Inventors:
William P. Platt, Columbia Heights, MN (US);
William A. Harris, Coon Rapids, MN (US);
Neil G. W. Hedtke, Minnetonka, MN (US);
Assignee:
Honeywell International Inc., Morristown, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 1/5125 ;
U.S. Cl.
CPC ...
G01P 1/5125 ;
Abstract
A method for reduces the sticking of proof masses in micro-electromechanical systems (MEMS) devices to sense plates in the MEMS device due to acceleration forces to which the MEMS device is subjected. The method includes determining a beginning of acceleration events which would cause proof masses to contact sense plates, reducing sense bias voltages to the sense plates, determining an end of the acceleration event, and increasing sense bias voltages to their former levels.