The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Nov. 01, 2000
Larry James Fisk, II, West Henrietta, NY (US);
William John VanRemmen, Jr., Geneseo, NY (US);
Kevin Peter Nasman, N. Chili, NY (US);
ENI Technology Inc., Rochester, NY (US);
Abstract
An apparatus and method for the detection of and recovery from a plurality of electrical transients in a plasma generator system is disclosed. The plasma generator system comprises a plasma chamber and a power amplifier is provided, wherein the apparatus comprises a sensor, the sensor detects an electrical transient in the electrical transients and outputs a first signal when the electrical transient is detected. The system also includes a first circuitry for receiving the first signal, the circuitry controlling said power output from said power amplifier in response to the first signal and outputting a second signal communicating the controlled power output, and a second circuitry for receiving the second signal, the second circuitry outputting a reset signal to the first circuitry, wherein the first circuitry receives the reset signal and resets the power output in response to the reset signal.