The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Sep. 30, 1999
Florian Schamberger, Bad Reichenhall, DE;
Helmut Schneider, München, DE;
Jürgen Lindolf, Friedberg, DE;
Thoai-Thai Le, München, DE;
Siemens Aktiengesellschaft, Munich, DE;
Abstract
A vertical MOS field effect transistor includes a gate disposed in a trench, a channel, and a source and a drain disposed in the substrate on the trench wall. The gate annularly surrounds a drain terminal which extends from the substrate surface as far as the drain disposed on the trench bottom. It is possible to produce vertical transistors with different channel lengths on a substrate with trenches of different widths by employing oblique implantation when producing the gate. A method of producing the vertical field effect transistor is also provided.