The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Nov. 27, 2002
Tatsuki Okamoto, Tokyo, JP;
Tetsuya Ogawa, Tokyo, JP;
Yukio Sato, Tokyo, JP;
Junichi Nishimae, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A laser optical system includes a linear beam forming member for forming laser beams radiated from laser oscillators into a linear beam shape on a silicon film on a substrate. The laser optical system is arranged so that the optical axes of laser beams from the laser oscillators to the linear beam forming member are in substantially the same plane and substantially perpendicular to the substrate. Each laser beam is reflected from a reflecting mirror and applied to the silicon film on the substrate. Since the laser beams are applied to the substrate at the same time, the area irradiated can be increased, while each radiating laser beam maintains a required radiation intensity, resulting in high productivity.