The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Jan. 29, 2003
Abstract
In a method for manufacturing a flash memory device, a first gate insulating film, a first gate conductive film, and a second insulating film are sequentially formed on a semiconductor substrate. A region where a first gate is to be formed is defined by etching the second insulating film to expose an upper portion of the first gate conductive film. Second conductive film spacers are formed along sidewalls of the etched second insulating film. An oxide film is formed on the exposed surface of the second conductive film spacers and the first gate conductive film. Silicon insulating spacers are formed on the sidewalls of the etched second insulating film. A source junction contact hole is formed by etching the first gate conductive film and the first gate insulating film by using the second insulating film and the silicon insulating film spacers as a mask. A source junction contact fill is formed filling the source junction contact hole. The first gate is formed by sequentially removing the second insulating film and the first gate conductive film.