The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Oct. 07, 2002
Yicheng Lu, East Brunswick, NJ (US);
Nuri William Emanetoglu, Woodbury, NJ (US);
Rutgers, The State University of New Jersey, New Brunswick, NJ (US);
Abstract
The present invention provides magnesium zinc oxide (Mg Zn O) as a new piezoelectric material, which is formed by alloying ZnO and MgO. Mg Zn O allows for flexibility in thin film SAW and BAW device design, as its piezoelectric properties can be tailored by controlling the Mg content, as well as by using Mg Zn O/ZnO multilayer structures. To experimentally prove it, the Mg Zn O (x≦0.35) thin films are grown on r-plane sapphire substrates at a temperature in the range of 400° C.-500° C. by metalorganic chemical vapor deposition. Mg Zn O films with Mg mole percent up to 0.35 have epitaxial quality and wurtzite crystal structure. The SAW properties, including velocity dispersion and piezoelectric coupling, are characterized and concluded that the acoustic velocity increases, whereas the piezoelectric coupling decreases with increasing Mg mole percent in piezoelectric Mg Zn O films.