The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Jan. 24, 2001
Applicant:
Inventor:
Marcel Tognetti, Dresden, DE;
Assignee:
Semiconductor300 GmbH & Co. KG, Dresden, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/600 ;
Abstract
There is described a reactor for manufacturing a semiconductor device. The reactor includes a container for enclosing a gas and has an aperture and a surface ambient to the aperture. A seal for sealing the aperture of the container with a surface is pressed against the surface of the container. Portions of the surface of the container and corresponding portions of the surface of the seal form a combination of a beveled peak and groove surrounding the aperture. Therefore, with improved sealing a pressure variation of the gas within the container caused by a pressure variation in the ambient environment is reduced.