The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Aug. 08, 2001
Applicant:
Inventors:
Tak Kui Wang, Havertown, PA (US);
Peisheng Sheng, Wilmington, DE (US);
Richard P. White, Glen Mills, PA (US);
Assignee:
Agilent Technologies, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 1/00 ;
U.S. Cl.
CPC ...
F16K 1/00 ;
Abstract
Micro-valves that include a diaphragm capable of being positioned on a valve seat or removed from the valve seat. The micro-valves also include supports and a cover that restrict the motion of the diaphragm, thereby reducing the possibility of cracking. Micro-valves made by anodically bonding the diaphragm to a seat substrate and anodically bonding the cover to the diaphragm. Micro-injectors that include micro-valves. Also, methods of making the micro-valves and micro-injectors.