The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Feb. 12, 2003
Applicant:
Inventors:
Mayumi Arai, Tokyo, JP;
Yoshiyuki Yamazaki, Tokyo, JP;
Assignee:
MKS Japan, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 5/100 ; F16K 4/900 ; B08B 9/032 ;
U.S. Cl.
CPC ...
F16K 5/100 ; F16K 4/900 ; B08B 9/032 ;
Abstract
A vaporizer comprises disks each including an aperture at a central portion thereof. A hollow pipe having apertures for permitting radial outflow of a liquid extends through the aperture of each of the discs so as to form a stack of the discs. A resilient member applies a biasing force to the discs, and structure applies a force, via fluid control, against the biasing force to thereby remove the biasing force from the discs. Liquid in the hollow pipe is adapted to be delivered from the apertures to spaces between the discs and vaporized in the spaces between the discs.