The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Aug. 28, 2001
Claus Strowitzki, Gilching, DE;
TuiLaser AG, Germering, DE;
Abstract
The present invention relates to an excimer laser comprising a charging circuit including a parallel connection of a storage capacitor (C ) with a series connection of a reoscillation inductance (L ), a charging inductance (L ) and a firing device (Z) for firing the excimer laser, wherein the storage capacitor (C ) has at least a terminal for connecting a power supply (U ), a peaking capacitor (C ) connected in parallel with the charging inductance (L ), a discharge path including two opposed electrodes (E , E ), connected in parallel with the peaking capacitor (C ), and a driving device for driving the firing device (Z), wherein the firing device (Z) is formed as a MOSFET array. The invention also relates to a corresponding method of operating such an excimer laser.