The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Aug. 26, 2002
Koshi Haraguchi, Shizuoka, JP;
Suruga Seiki Co., Ltd., Shizuoka, JP;
Abstract
A semiconductor device inspecting apparatus includes a chamber, a stage situated in the chamber for placing a semiconductor device thereon, a femtosecond laser apparatus, and an electron microscope. The femtosecond laser apparatus includes a laser generating section for generating laser beams disposed outside the chamber, and a laser optical system for introducing the laser beams generated at the laser generating section into the chamber. The laser generating section generates femtosecond width pulse and a strength so that the semiconductor device on the stage is cut by the laser beams introduced inside the chamber. The electron microscope is disposed inside the chamber for observing the semiconductor device cut by the laser beams.