The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Dec. 21, 2001
Fuyuhiko Inoue, San Mateo, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
An optical characteristic measuring method with which to measure an optical characteristic of an optical system to be examined. The optical characteristic measuring method includes detecting positions of a plurality of features in a picked-up image by repeating a calculating step of image information, a calculating step of comparison feature positions, and a correcting and updating step of current estimated feature positions, until the differences between an initial estimated feature positions and the comparison feature positions become at or below a permissible limit, and calculating an optical characteristic of the optical system to be examined based on the detected positions of the plurality of features.