The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Sep. 28, 2001
Applicant:
Inventors:
Masafumi Ide, Tokorozawa, JP;
Toshiyuki Sameshima, Kokubunji, JP;
Assignee:
Citizen Watch Co., Ltd., Nishitokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C 5/00 ; H01L 2/1469 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
G03C 5/00 ; H01L 2/1469 ; H01L 2/14763 ;
Abstract
Supports ( ) are formed to be arrayed on a support base ( ), a sacrifice layer ( ) is formed of a resin material, and the sacrifice layer ( ) is planarized so as to expose the top of the respective supports ( ), thereby forming a thin-film substrate ( ) on top of the sacrifice layer ( ) as planarized, and the supports ( ). The sacrifice layer ( ) is removed by plasma selective etching thereof through the intermediary of the thin-film substrate, and thereby a large-area thin-film substrate ( ) floatingly spaced by a space ( ) away from the support base ( ) can be fabricated.