The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Dec. 24, 2002
Applicant:
Inventor:
Lionel Girardie, Eybens, FR;
Assignee:
Memscap, Bernin, FR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 1/800 ;
U.S. Cl.
CPC ...
B32B 1/800 ;
Abstract
A multilayer structure, used especially as a material of high relative permittivity, includes a plurality of separate layers, each having a thickness of less than 500 Å, and based on hafnium dioxide (HfD ), zirconium dioxide (ZrO ) and alumina (Al O ). In practice, the hafnium dioxide, zirconium dioxide and alumina layers form alloys of formula Hf ZrAl O . Advantageously, the stoichiometry of the Hf ZrAl O alloys varies from one layer to another.