The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2004
Filed:
Dec. 26, 2001
Takamasa Tsumoto, Kuga-gun, JP;
Hiroyuki Kurata, Kuga-gun, JP;
Hiroaki Nakagawa, Kuga-gun, JP;
Minoru Fujita, Kuga-gun, JP;
Mitsui Chemicals, Inc., Tokyo, JP;
Abstract
A pellicle comprising a pellicle film, a pellicle frame supporting the pellicle film, and an adhesive resin layer provided on the surface of the pellicle frame on the side opposite to the surface supporting the pellicle film, wherein the adhesive resin layer is formed of a combination of a hard resin layer and a soft resin layer. The pellicle can be mounted on the mask and can be removed from the mask without giving damage to the mask, and does not spoil the flatness of the mask irrespective of when the mask surface is maintained in either the horizontal direction or the vertical direction.