The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2004
Filed:
Dec. 20, 2001
Feng Niu, Weston, FL (US);
Wayne W. Chiou, Sunrise, FL (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
Torsional hinge support beams ( ) that are corrugated, perforated and/or have non-uniform width are provided. The support beams are useful in flexural beam resonators ( ), in which they serve to support the main flexural mode-vibrating beam ( ). The support beams have phase lengths equal to an odd multiple of &pgr;/2, preferably the phase lengths are about equal to &pgr;/2 at the operating frequency of the resonators. Owing to the corrugations, the lengths of the support beams are shorter than comparable solid straight edge support beams. The short lengths of the support beams reduce the overall area occupied by the resonators and allow higher bias voltage to be employed in order to obtain greater electromechanical coupling.