The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2004

Filed:

Dec. 27, 2002
Applicant:
Inventors:

Jun Kikuchi, Tokyo, JP;

Haruhisa Matsumoto, Tsukuba, JP;

Hideki Koshiishi, Tsukuba, JP;

Takashi Nozaki, Moriya, JP;

Shigeru Takehisa, Moriya, JP;

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/7304 ; H01J 3/726 ;
U.S. Cl.
CPC ...
H01J 3/7304 ; H01J 3/726 ;
Abstract

A charged particle measuring apparatus discriminates the types of charged particles accurately and the energy precisely, measures high-energy charged particles precisely, and detects a failure of the apparatus to continue measurement in a mode corresponding to the failure. Outputs from first and second detectors are used as first and second addresses, respectively. The second detector includes a plurality of detectors. The output from a third detector is used as information about whether or not certain charged particles penetrate the second detector. The loss energy characteristics of charged particles to be measured are expressed in the first and second addresses. The number of times the charged particles are measured for loss energy are counted with respect to the addresses. When the series of detectors constituting the first, second, and third detectors suffers a failure, a measurement mode excluding any failed detector is employed to continue measurement.


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