The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2004
Filed:
Mar. 22, 2001
Akira Egawa, Chiba, JP;
Tatsuya Miyatani, Chiba, JP;
Seiko Instruments Inc., Chiba, JP;
Abstract
A scanning probe microscope capable of producing high precision sample images repeatedly has a driving unit for driving a sample or probe relative to the other microscopically in X, Y and Z directions, displacement detectors for measuring displacement of the driving unit in each of the X, Y and Z directions, and an image correction unit for storing output values of the displacement detectors as a data array for each of the X, Y and Z directions, performing a correction process on the data arrays, and producing an image of the sample based on the corrected data. A controller controls a measuring unit and output values of the displacement detectors are supplied to an operation/display unit connected to the controller and then supplied to an image correction device for image correction.