The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2004
Filed:
Dec. 18, 2002
Seok Su Kim, Kyoungki-do, KR;
Dongbu Electronics Co., Ltd., Seoul, KR;
Abstract
A method of fabricating a mask ROM comprising: preparing a substrate defined by a memory cell array region and a peripheral region; forming a device isolation film between the memory cell array region and the peripheral region; forming a gate-forming material layer; covering the memory cell array region and selectively etching the gate-forming material layer in the peripheral region to form a first gate; forming an insulation spacer in a lateral portion of the gate; injecting ion to the substrate in the peripheral region to form a source/drain region; forming salicide on the gate-forming material layer of the memory cell array region and the gate and in the source/drain region; covering the peripheral region and selectively etching the gate-forming material layer in the memory cell array region to form a second gate; and forming a protective film on the resultant substrate.