The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2004
Filed:
May. 14, 2003
Applicant:
Inventor:
Yumiko Ohsaki, Tochigi-ken, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C 5/00 ;
U.S. Cl.
CPC ...
G03C 5/00 ;
Abstract
An exposure method for printing, upon a photosensitive material, a pattern having fine lines of an odd number extending about a certain point. The method includes a multiple exposure process using a phase shift mask having an even number of boundaries defined with a phase difference of 180 degrees between adjacent regions about the point, wherein the number of the boundaries is larger than the number of fine lines.