The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 16, 2004

Filed:

Sep. 21, 2000
Applicant:
Inventor:

Shigehiro Fuwa, Tokorozawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 5/16 ; G01D 5/34 ;
U.S. Cl.
CPC ...
H01J 5/16 ; G01D 5/34 ;
Abstract

Optical apparatus for measuring displacement of a moveable member so as to enable compact construction and high accuracy measurement includes an optical grid, a light source, a plurality of light receiving arrays, and an operating circuit. Also, each of the plurality of light receiving arrays has a plurality of light receiving elements arranged at a pitch S. The operating circuit calculates the displacement of the moveable member based on outputs from the plurality of light receiving arrays, which are arranged so that a predetermined distance in a direction of displacement shifts one from another.


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