The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2004
Filed:
Feb. 24, 2003
Spencer B. Barrett, Beaverton, OR (US);
Mark A. Unrath, Portland, OR (US);
Donald R. Cutler, Portland, OR (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
A tertiary positioner system ( ) of this invention employs X- and Y-axis translation stages ( ), galvanometer-driven mirrors ( ), and a fast steering mirror (“FSM”) ( ) to direct a laser beam ( ) to target locations ( ) on a workpiece ( ). A positioning signal is received by a low-pass filter ( ) that produces filtered position data for driving the X- and Y-axis translation stages. The actual positions of the X- and Y-axis translation stages are subtracted from the unfiltered positioning data to produce an X-Y position error signal for driving the galvanometer-driven X- and Y-axis mirrors. The actual mirror positions are subtracted from the actual positions of the X- and Y-axis translation stages to generate a positional error signal representing the difference between the commanded and actual positions of the laser beam. The positional error signal drives the FSM to rapidly correct any positional errors.