The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2004
Filed:
Feb. 08, 2002
Applicant:
Inventor:
Masami Murai, Nagano, JP;
Assignee:
Seiko Espon Corporation, , JP;
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 ; H01L 4/1083 ;
U.S. Cl.
CPC ...
B41J 2/045 ; H01L 4/1083 ;
Abstract
A piezoelectric element with stable and excellent piezoelectric properties is made by: a step of forming a diaphragm ( ) on a substrate (S1); a step of forming a bottom electrode on the diaphragm (S2); a step of forming a first piezoelectric layer on the bottom electrode (S3); a step of patterning both the piezoelectric layer and the bottom electrode (S4); a step of forming a second piezoelectric layer on the piezoelectric layer and on the diaphragm to mature a piezoelectric film (S5); and a step of forming a top electrode on the piezoelectric film (S6).