The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2004
Filed:
Nov. 08, 2000
Thomas Bifano, Mansfield, MA (US);
The Trustees of Boston University, Boston, MA (US);
Abstract
An array of micro valves, and the process for its formation, used for control of a fluid flow and having a substrate with a plurality of apertures for directing the fluid to flow from one side to another. A micromechanically formed fluid seal surrounds each aperture along with a valve diaphragm associated with each seal and micromechanically formed to selectively open and close the aperture by making contact with the seal. Electrical contact is made to the valve diaphragms and substrate for selective valve closure or opening. A conduit leads a fluid flow to the underside of the array and a further conduit leads it away from the array after passing through the selectively opened diaphragms.