The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Jan. 03, 2003
Yoshiyuki Ishikura, Tokyo, JP;
Yamatake Corporation, Tokyo, JP;
Abstract
A capacitive pressure sensor includes a first substrate ( ), a first flat electrode ( ) formed on the first substrate ( ), a pressure-sensing frame ( ) surrounding the first flat electrode ( ) provided on the first substrate ( ), second substrates ( ) connected to the pressure-sensing frame ( ) opposedly to the first substrate ( ) and forming a capacitance chamber ( ) together with the first substrate ( ) and the pressure-sensing frame ( ), a stage ( ) provided on the second substrates ( ) in the capacitance chamber ( ), separated from the pressure-sensing frame ( ), and opposed to and separated from the first flat electrode ( ), and a second flat electrode ( ) provided on the stage ( ) and opposed to the first flat electrode ( ), wherein the pressure-sensing frame ( ) deforms elastically according to a pressure applied to the first and second substrates ( ).